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KMID : 1151820100040040033
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Journal of the Korean Society of Radiology
2010 Volume.4 No. 4 p.33 ~ p.36
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Property of Carbon Layer for C/W Multilayer Mirror
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Park Byoung-Hun
Cho Hyung-Wook
Oh Sun-Ju
Yoon Kwon-Ha
Chon Kwon-Su
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Abstract
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Multilayer mirrors are very useful for applications of high energy X-ray. X-rays of high energy require very small thickness, a few nanometers, in the d-spacing of a multilayer mirror. Each layer is composed of a multilayr mirror influences to interfacial roughness or interdiffusion which gives rise to degrade specular reflection. Carbon layer of 1 nm thick in a C/W multilayer mirror of 3.25 nm d-spacing was examined. Carbon as well as tungsten layers were very uniform, and there was no micro-structure in carbon layers. However, interdiffusion between carbon and tungste layers was observed by a transmission electron microscope.
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KEYWORD
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X-Ray, Multilayer Mirror, Interdiffusion, Interfacial Roughness
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